Deposition of Cu films for laser mirror by partially ionized beam deposition.

Title
Deposition of Cu films for laser mirror by partially ionized beam deposition.
Authors
고석근장홍규윤영수정형진김기환
Keywords
copper
Issue Date
1996-01
Publisher
Mat. res. soc. proc.
Citation
v. 396, 575-580
URI
http://pubs.kist.re.kr/handle/201004/11704
Appears in Collections:
KIST Publication > Conference Paper
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