Controls of crystallinity and surface roughness of Cu film in partially ionized beam deposition

Title
Controls of crystallinity and surface roughness of Cu film in partially ionized beam deposition
Authors
고석근김기환최원국장홍규윤영수Sung Han정형진
Keywords
crystallinity
Issue Date
1996-01
Publisher
Mat. res. soc. symp. proc.
Citation
VOL 396, 581-586
URI
http://pubs.kist.re.kr/handle/201004/11708
Appears in Collections:
KIST Publication > Conference Paper
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