Copper film growth by chemical vapor deposition.

Title
Copper film growth by chemical vapor deposition.
Authors
윤경렬최두진김석김기환고석근
Issue Date
1996-01
Publisher
한국재료학회지; Korean journal of materials research
Citation
v. 6, no. 7, 723-?
URI
http://pubs.kist.re.kr/handle/201004/11740
Appears in Collections:
KIST Publication > Article
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