Lateral growth rate control of GaAs on patterned substrates by CCl//4 and CBr//4 during MOCVD.

Title
Lateral growth rate control of GaAs on patterned substrates by CCl//4 and CBr//4 during MOCVD.
Authors
김용김무성김성일황성민민병돈민석기
Keywords
MOCVD
Issue Date
1996-01
Publisher
8th int. conf. on MOVPE
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11744
Appears in Collections:
KIST Publication > Conference Paper
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