Study on physical properties of Cu-CVD for ULSI interconnects.

Title
Study on physical properties of Cu-CVD for ULSI interconnects.
Authors
김용태Y. S. KimS. K. KwakC. S. KwonD. G. Jung민석기
Issue Date
1996-01
Publisher
한국물리학회 제 72 회 학술논문발표회
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11799
Appears in Collections:
KIST Publication > Conference Paper
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