The improvement of mechanical properties of aluminum nitride and alumina by 1 keV Ar+ ion irradiation in reactive gas environment

Title
The improvement of mechanical properties of aluminum nitride and alumina by 1 keV Ar+ ion irradiation in reactive gas environment
Authors
고석근손용배감직상C. J. Kim최원국정형진
Keywords
XPS
Issue Date
1996-01
Publisher
Mat. res. soc. symp. proc.
Citation
VOL 396, 261-265
URI
http://pubs.kist.re.kr/handle/201004/11805
Appears in Collections:
KIST Publication > Conference Paper
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