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Epitaxial growth of deep ultraviolet light emitting diodes with two-step n-AlGaN layer

Authors

So, Byeongchan; Cheon, Changheon; Lee, Joohyoung; Lee, Junchae; Kwak, Taemyung; Choi, Uiho; Song, JinDong; Chang, Joonyeon; Nam, Okhyun

Issue Date

2020-08-31

Publisher

ELSEVIER SCIENCE SA

Citation

THIN SOLID FILMS, v.708

Keywords

CRACK-FREE; THICK ALN; SAPPHIRE; FILMS; CRACK-FREE; THICK ALN; SAPPHIRE; FILMS; Deep ultraviolet light emitting diodes; Epitaxial growth; High temperature metal organic chemical vapor deposition; n-Aluminum gallium nitride layer; Two-step deposition

ISSN

0040-6090

URI

https://pubs.kist.re.kr/handle/201004/118238

DOI

10.1016/j.tsf.2020.138103

Appears in Collections:

KIST Article > 2020

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