Optical properties of carbon nitride films deposited by combined ion-beam and laser-ablation method.

Title
Optical properties of carbon nitride films deposited by combined ion-beam and laser-ablation method.
Authors
박성진이순일오수기배장환김원목정병기김순광
Keywords
CN film
Issue Date
1996-10
Publisher
2nd Korea-Japan symposium on plasma and thin film technology
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11845
Appears in Collections:
KIST Publication > Conference Paper
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