Applications of ion beam of a few keV for thin film growth and surface modification

Title
Applications of ion beam of a few keV for thin film growth and surface modification
Authors
고석근최원국장홍규윤영수송석균박성철조준식김기환정형진
Keywords
thin film
Issue Date
1996-03
Publisher
Ungyong Mulli (The Korean physical society)
Citation
VOL 9, NO 2, 199-206
URI
http://pubs.kist.re.kr/handle/201004/11869
Appears in Collections:
KIST Publication > Article
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