Deposition of hydrogenfree diamond-like-carbon film by plasma enhanced chemical vapor depositoin.

Title
Deposition of hydrogenfree diamond-like-carbon film by plasma enhanced chemical vapor depositoin.
Authors
K. C. ParkJ. H. MoonJ. Jang오명환
Issue Date
1996-06
Publisher
Applied physics letters
Citation
v. 68, no. 25, 3592-3594
URI
http://pubs.kist.re.kr/handle/201004/11883
ISSN
0003-6951
Appears in Collections:
KIST Publication > Article
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