Post-growth annealing effects of low-temperature grown TiO//2 thin films on InP substrate by low-pressure metalorganic chemical vapor deposition.

Title
Post-growth annealing effects of low-temperature grown TiO//2 thin films on InP substrate by low-pressure metalorganic chemical vapor deposition.
Authors
김은규민석기염상섭손맹호한영기왕채현
Keywords
post-growth annealing
Issue Date
1996-04
Publisher
J. appl. phys.
Citation
v. 79, no. 8, 4459-4461
URI
http://pubs.kist.re.kr/handle/201004/11895
Appears in Collections:
KIST Publication > Article
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