A study on the fabrication of vertical-walled cavity and direct bonding method

Title
A study on the fabrication of vertical-walled cavity and direct bonding method
Authors
고창기주병권이윤희정성재이남양고근하박정호오명환
Issue Date
1996-07
Publisher
대한전기학회 하계학술대회 논문집, 용평리조트
Citation
, 1943-1945
URI
http://pubs.kist.re.kr/handle/201004/11901
Appears in Collections:
KIST Publication > Conference Paper
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