Enhancement of lateral growth rate during MOCVD growth on patterned GaAs substrates with CBr//4.

Title
Enhancement of lateral growth rate during MOCVD growth on patterned GaAs substrates with CBr//4.
Authors
김은규S.I. KimM.S. KimY. KimS.M. HwangB.D. MinC.S. Son민석기
Keywords
lateral growth rate
Issue Date
1996-07
Publisher
Digest of Papers on the 9th Int'l Micro-process Conference.
Citation
, 116-169
URI
http://pubs.kist.re.kr/handle/201004/11905
Appears in Collections:
KIST Publication > Conference Paper
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