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dc.contributor.authorLEE, KR-
dc.contributor.authorEUN, KY-
dc.contributor.authorRHEE, JS-
dc.date.accessioned2024-01-19T18:08:42Z-
dc.date.available2024-01-19T18:08:42Z-
dc.date.created2022-03-07-
dc.date.issued1995-
dc.identifier.issn0272-9172-
dc.identifier.urihttps://pubs.kist.re.kr/handle/201004/119057-
dc.languageEnglish-
dc.publisherMATERIALS RESEARCH SOC-
dc.titleStructure and mechanical properties of nitrogen incorporated diamond-like carbon films-
dc.typeConference-
dc.description.journalClass1-
dc.identifier.bibliographicCitationSymposium on Thin Films - Stresses and Mechanical Properties V, at the 1994 Fall Meeting of the Materials-Research-Society, v.356, pp.233 - 238-
dc.citation.titleSymposium on Thin Films - Stresses and Mechanical Properties V, at the 1994 Fall Meeting of the Materials-Research-Society-
dc.citation.volume356-
dc.citation.startPage233-
dc.citation.endPage238-
dc.citation.conferencePlaceUS-
dc.citation.conferencePlaceBOSTON, MA-
dc.citation.conferenceDate1994-11-28-
dc.relation.isPartOfTHIN FILMS: STRESSES AND MECHANICAL PROPERTIES V-
dc.identifier.wosidA1995BD53A00035-
dc.identifier.scopusid2-s2.0-0029226711-
dc.type.docTypeProceedings Paper-
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