Field emission properties of Mo-coated Si field emitter arrays and formation of molybdenum silicide

Title
Field emission properties of Mo-coated Si field emitter arrays and formation of molybdenum silicide
Authors
주병권H. W. Park이윤희I. J. ChungM. R. HaskardJ. H. Park오명환
Keywords
field emitter; electron field emission; molybdenum; silicon; vacuum microelectronics
Issue Date
1996-07
Publisher
Technical digest of 9th international vacuum microelectronics conference, St. Petersburg, Russia.
Citation
, 221-225
URI
http://pubs.kist.re.kr/handle/201004/11906
Appears in Collections:
KIST Publication > Conference Paper
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