Direct shrinkage observation of oxidation induced stacking faults in p-type CZ silicon.

Title
Direct shrinkage observation of oxidation induced stacking faults in p-type CZ silicon.
Authors
김용태민석기
Issue Date
1996-08
Publisher
Proc. 1986 Seoul int. symp. phys. semicond. & appl.
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/11934
Appears in Collections:
KIST Publication > Conference Paper
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