Silicon to silicon anodic bonding using lithium doped interlayer

Title
Silicon to silicon anodic bonding using lithium doped interlayer
Authors
정지원주병권최우범정성재이남양최두진오명환
Keywords
MEMS; vacuum microelectronics; wafer bonding
Issue Date
1997-01
Publisher
센서기술학술대회 논문집 , 서울대
Citation
, 227-232
URI
http://pubs.kist.re.kr/handle/201004/11953
Appears in Collections:
KIST Publication > Conference Paper
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