Comparison of properties of tin oxide films deposited by reactive-partially ionized beam, ion assisted, and hybrid ion beam methods

Title
Comparison of properties of tin oxide films deposited by reactive-partially ionized beam, ion assisted, and hybrid ion beam methods
Authors
송석균최원국H. K. Baik정형진고석근
Keywords
reactive ion-assisted reaction
Issue Date
1997-01
Publisher
Nanostructured materials.
Citation
VOL 8, NO 4, 477-488
URI
http://pubs.kist.re.kr/handle/201004/11994
Appears in Collections:
KIST Publication > Article
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