Gate passivation technique for modulation-doped-effect-transistors using electron beam lithography

Title
Gate passivation technique for modulation-doped-effect-transistors using electron beam lithography
Authors
B.H. Choi김회종S.K. JungE.K. KimS.K. MinS.W. HwangJ.H. Park
Keywords
passivation
Issue Date
1997-01
Publisher
춘계 물리학회지
Citation
VOL 15, NO 1, 192-?
URI
http://pubs.kist.re.kr/handle/201004/12004
Appears in Collections:
KIST Publication > Conference Paper
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