Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining

Title
Fabrication process of PZT piezoelectric cantilever unimorphs using surface micromachining
Authors
김준한Lei WangShayne M. ZurnLi LiDennis L. Pollar윤영수
Issue Date
1997-01
Publisher
Integrated ferroelectrics
Citation
VOL 15, 325-?
URI
http://pubs.kist.re.kr/handle/201004/12009
ISSN
1058-4587
Appears in Collections:
KIST Publication > Article
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