Heteroepitaxial growth of β -SiC using plasma activated methane and silane sources

Title
Heteroepitaxial growth of β -SiC using plasma activated methane and silane sources
Authors
김홍석박영준최인훈은광용백영준
Keywords
heteroepitaxial growth
Issue Date
1997-01
Publisher
Abstracts of the 1st Asian-European international conference on plasma surface engineering.
Citation
, 186-186
URI
http://pubs.kist.re.kr/handle/201004/12010
Appears in Collections:
KIST Publication > Conference Paper
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