Metal organic chemical vapor deposition of ferroelectric SrBi//2Ta//2O//9 thin films.

Title
Metal organic chemical vapor deposition of ferroelectric SrBi//2Ta//2O//9 thin films.
Authors
K. B. LeeH. S. LeeK. W. ParkT. W. KimM. R. LeeC. T. Kim주병권
Keywords
FED; FEA; insulator
Issue Date
1997-01
Publisher
Proc. MRS '97 fall meeting, Boston, USA
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/12039
Appears in Collections:
KIST Publication > Conference Paper
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