The control of stoichiometry and crystallinity of SnOx thin films applied for chemical sensor element

Title
The control of stoichiometry and crystallinity of SnOx thin films applied for chemical sensor element
Authors
최원국조정고석근J. S. ChoY. S. Yoon정형진
Keywords
reactive ion-assisted deposition
Issue Date
1997-01
Publisher
Proceedings of the 3rd East Asian conference on chemical sensors.
Citation
, 558-?
URI
http://pubs.kist.re.kr/handle/201004/12076
Appears in Collections:
KIST Publication > Conference Paper
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