Formation of silicon nano-crystallites by electron cyclotron resonance chemical vapor deposition and ion beam assisted electron beam deposition

Title
Formation of silicon nano-crystallites by electron cyclotron resonance chemical vapor deposition and ion beam assisted electron beam deposition
Authors
김은규민석기최원철박종윤
Keywords
Si nano-crystallites
Issue Date
1997-12
Publisher
MRS 1997 fall meeting
Citation
, 203-203
URI
http://pubs.kist.re.kr/handle/201004/12149
Appears in Collections:
KIST Publication > Conference Paper
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