Si-rich SiN를 이용한 GaAs/AlGaAs 다층 양자 우물에서 Al-Ga 상호 확산의 감소

Title
Si-rich SiN를 이용한 GaAs/AlGaAs 다층 양자 우물에서 Al-Ga 상호 확산의 감소
Authors
최원준한상민Syed ljaz Shah최석근우덕하한일기김회종김선호이정일강광남
Keywords
quantum well
Issue Date
1997-12
Publisher
MRS (Materials Research Society) 97 Fall meeting
Citation
, ?-?
URI
http://pubs.kist.re.kr/handle/201004/12153
Appears in Collections:
KIST Publication > Conference Paper
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