Fabrication and field emission study of 2-inch DLC coated Si FEAs panel

Title
Fabrication and field emission study of 2-inch DLC coated Si FEAs panel
Authors
이상조강호관주병권문성욱이윤희전동렬오명환
Keywords
FED; FEA; DLC coating
Issue Date
1997-04
Publisher
대한전기학회 MEMS 연구회 학술발표회 논문집 , 고려대
Citation
, 249-253
URI
http://pubs.kist.re.kr/handle/201004/12193
Appears in Collections:
KIST Publication > Conference Paper
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