BCl ₃ -NH ₃계의 플라즈마 화학증착공정을 이용한 질화붕소막의 합성

Title
BCl ₃ -NH ₃계의 플라즈마 화학증착공정을 이용한 질화붕소막의 합성
Authors
백영준박범수은광용
Keywords
질화붕소
Issue Date
1997-03
Publisher
Journal of the Korean ceramic society.
Citation
VOL 34, NO 3, 249-256
URI
http://pubs.kist.re.kr/handle/201004/12205
Appears in Collections:
KIST Publication > Article
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