Electrical and Optical Investigation of the Growth Behavior of Au Nanoparticles Fabricated on Various Matrix Materials by the Alternating Sputtering Method

Abstract

Nanocomposite films, which are comprised of metal nanoparticles dispersed in a matrix layer, have attracted great interest due to their unique electrical and optical properties, which are mainly due to the excitation of localized surface plasmons. In this study, we employed an alternating sputtering method to fabricate such nanocomposite films. We then systematically investigated the effect of SiO2, (Ba,Sr)TiO2, and Si matrix materials on the growth behavior of Au nanoparticles and their geometric distribution, which strongly affects their plasmonic properties, using both electrical and optical means. From the results, we suggest an effective way of monitoring the growth stages of Au nanoparticles and adjusting their geometric distribution to a desired form, by properly selecting the combination of materials and process controls.