Characteristics on the gate insulator of metal tip field emitter arrays after wet etching process

Title
Characteristics on the gate insulator of metal tip field emitter arrays after wet etching process
Authors
정유호주병권정재훈이윤희오명환김철주
Keywords
FED; insulator; wet etching
Issue Date
1997-06
Publisher
Japanese journal of applied physics, part 1.
Citation
VOL 36, NO 6A, 3576-3579
URI
http://pubs.kist.re.kr/handle/201004/12229
Appears in Collections:
KIST Publication > Article
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