Direct formation of nanocrystalline silicon by electron cyclotron resonance chemical vapor deposition

Title
Direct formation of nanocrystalline silicon by electron cyclotron resonance chemical vapor deposition
Authors
최원철김은규민석기박종윤김준형성태연
Keywords
direct formation; nano-crystaaline silicon; ECR-CVD; visible luminescence; PL; TEM
Issue Date
1997-06
Publisher
Applied physics letters.
Citation
VOL 70, NO 22, 3014-3016
URI
http://pubs.kist.re.kr/handle/201004/12251
Appears in Collections:
KIST Publication > Article
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