Effect of ion energy structure and chemical properties of tin oxide film in reactive ion-assisted deposition(R-IAD)

Title
Effect of ion energy structure and chemical properties of tin oxide film in reactive ion-assisted deposition(R-IAD)
Authors
고석근조준식최원국윤기현조정정형진
Issue Date
1997-06
Publisher
Journal of ISHM-Korea
Citation
VOL 4, NO 1, 19-30
URI
http://pubs.kist.re.kr/handle/201004/12252
Appears in Collections:
KIST Publication > Article
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