Effects on the oxidation rate with silicon orientation and its surface morphology

Title
Effects on the oxidation rate with silicon orientation and its surface morphology
Authors
전법주오인환임태훈정일현
Keywords
ECRCVD; a-Si:H; silicon orientation; surface morphology
Issue Date
1997-06
Publisher
Journal of the Korean Industrial and Engineering Chemistry; 공업화학
Citation
VOL 8, NO 3, 395-402
URI
http://pubs.kist.re.kr/handle/201004/12261
ISSN
1225-0112
Appears in Collections:
KIST Publication > Article
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