Enhancement of adhesion between Cu thin film and polyimide modified by ion assisted reaction

Title
Enhancement of adhesion between Cu thin film and polyimide modified by ion assisted reaction
Authors
최성창최원국고석근석진우손용배정형진
Keywords
ion assisted reaction
Issue Date
1997-06
Publisher
Journal of ISHM
Citation
VOL 4, NO 1, 19-30
URI
http://pubs.kist.re.kr/handle/201004/12262
Appears in Collections:
KIST Publication > Article
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