Structure and mechanical properties of nitrogenated diamond-like carbon films deposited by RF-PACVD

Title
Structure and mechanical properties of nitrogenated diamond-like carbon films deposited by RF-PACVD
Authors
이광렬은광용
Keywords
다이아몬드상 카본 필름; 내마모윤활특성
Issue Date
1997-05
Publisher
Journal of the Korean vacuum society.
Citation
VOL 6, NO 2, 151-158
URI
http://pubs.kist.re.kr/handle/201004/12264
Appears in Collections:
KIST Publication > Article
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