Oxygen distribution in the heteroepitaxially grown Y//2O//3 films on Si substrates

Title
Oxygen distribution in the heteroepitaxially grown Y//2O//3 films on Si substrates
Authors
김효배M.H. ChoS.W. WhangboC.N. WhangS.C. Choi최원국송종한S.O. Kim
Keywords
Y//2O//3
Issue Date
1998-01
Publisher
Nuclear instruments & methods in physics research. Section B, Beam interactions with materials and atoms
Citation
VOL 142, 393-396
URI
http://pubs.kist.re.kr/handle/201004/12387
ISSN
0168-583X
Appears in Collections:
KIST Publication > Article
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