Soft magnetic properties of as-deposited Fe-Hf-C-N films by N2 reactive RF magnetron sputtering

Title
Soft magnetic properties of as-deposited Fe-Hf-C-N films by N2 reactive RF magnetron sputtering
Authors
송재용김종렬김희중이정중
Keywords
soft magnetic properties; as-deposited; Fe-Hf-C-N films; sputtering condition
Issue Date
1998-01
Publisher
Journal de physique. IV, Proceedings
Citation
VOL 8, Pr2-363-Pr2-366
URI
http://pubs.kist.re.kr/handle/201004/12393
ISSN
1155-4339
Appears in Collections:
KIST Publication > Article
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