Etching effect of carbon tetrabromide in the vertical growth of GaAs during metalorganic chemical vapor deposition

Title
Etching effect of carbon tetrabromide in the vertical growth of GaAs during metalorganic chemical vapor deposition
Authors
손창식박영균김성일
Keywords
Etching effect
Issue Date
1998-11
Publisher
Abstracts of the 9th Seoul International Symposium on the Physics of Semiconductors and Applications
Citation
, 135-135
URI
http://pubs.kist.re.kr/handle/201004/12503
Appears in Collections:
KIST Publication > Conference Paper
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