Study of electron energy distribution functions (FEDFs) in three DC low-pressure plasma sources

Title
Study of electron energy distribution functions (FEDFs) in three DC low-pressure plasma sources
Authors
Tatjana AntonovaGleb BougrovAntonina Bougrova최원국Leonid Goncharov정형진고석근Sergey KondraninElena KralkinaEvgeniy SitinVladimir Obukhov
Keywords
regularization method; electron energy distribution fuction; DC low pressure plasma; broad gridded ion source
Issue Date
1998-12
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 37, NO 12B, 6906-6915
URI
http://pubs.kist.re.kr/handle/201004/12509
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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