Effect of cerium silicate formation on the structural and electrical properties of Pt/SrBi2Ta2O9/CeO2/Si capacitors

Title
Effect of cerium silicate formation on the structural and electrical properties of Pt/SrBi2Ta2O9/CeO2/Si capacitors
Authors
이호녕신동석김용태최성호
Keywords
MEFIS; SrBi2Ta2O9; CeO2; memory window
Issue Date
1998-12
Publisher
Ferroelectric Thin Films VII (Materials Research Society Symposium Proceeding)
Citation
VOL 541, 543-548
URI
http://pubs.kist.re.kr/handle/201004/12526
Appears in Collections:
KIST Publication > Conference Paper
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