Electrical properties of electron-beam exposed silicon dioxides and their application to nano-devices

Title
Electrical properties of electron-beam exposed silicon dioxides and their application to nano-devices
Authors
최범호정석구김석일황성우박정호김용김은규민석기
Keywords
electron-beam
Issue Date
1998-12
Publisher
Japanese journal of applied physics
Citation
VOL 37, 6996-6997
URI
http://pubs.kist.re.kr/handle/201004/12527
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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