Structural and electrical properties of excess PbO doped Pb(Zr0.52Ti0.48)O3 thin films using rf magnetron sputtering method

Title
Structural and electrical properties of excess PbO doped Pb(Zr0.52Ti0.48)O3 thin films using rf magnetron sputtering method
Authors
김태송김동주이전국정형진
Keywords
PZT; sputtering method
Issue Date
1998-12
Publisher
Journal of materials research
Citation
VOL 13, NO 12, 3436-3441
URI
http://pubs.kist.re.kr/handle/201004/12537
ISSN
0884-2914
Appears in Collections:
KIST Publication > Article
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