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Fabrication and characteristics of microelectromechanical system device based on PZT films and surface micromachining

Title
Fabrication and characteristics of microelectromechanical system device based on PZT films and surface micromachining
Authors
윤영수; 김준한; M. T. Hsieh; D. L. Polla
Keywords
MEMS
Issue Date
1998-02
Publisher
Journal of the Korean Physical Society
Citation
VOL 32, S1760-S1762
URI
http://pubs.kist.re.kr/handle/201004/12540
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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