Characteristics of Pb(Zr0.53Ti0.47)O3 films deposited by metalorganic decomposition on Pt/Ti/TiO2/polysilicon/Si3N4/Si for pizoelectric microelectromechanical system devices

Title
Characteristics of Pb(Zr0.53Ti0.47)O3 films deposited by metalorganic decomposition on Pt/Ti/TiO2/polysilicon/Si3N4/Si for pizoelectric microelectromechanical system devices
Authors
김준한윤영수D. L. Polla
Keywords
MEMS; pizoelectric film; PZT; micromachining; heat treatment; Si3N4; pizoelectric constant
Issue Date
1998-03
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 37, NO 3A, 948-950
URI
http://pubs.kist.re.kr/handle/201004/12551
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
Files in This Item:
There are no files associated with this item.
Export
RIS (EndNote)
XLS (Excel)
XML


qrcode

Items in DSpace are protected by copyright, with all rights reserved, unless otherwise indicated.

BROWSE