Annealing process of Pt/Ti/TiO2/polysilicon/Si3N4/Si-wafer using as a substrate of Pb(Zr0.53Ti0.47)O3 thin films for piezoelectric microelectromechanical system devices

Title
Annealing process of Pt/Ti/TiO2/polysilicon/Si3N4/Si-wafer using as a substrate of Pb(Zr0.53Ti0.47)O3 thin films for piezoelectric microelectromechanical system devices
Authors
김준한윤영수Dennis L. Polla
Keywords
MEMS
Issue Date
1998-02
Publisher
Journal of the Korean Physical Society
Citation
VOL 32, S1580-S1582
URI
http://pubs.kist.re.kr/handle/201004/12555
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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