Characteristics of ZnO thin film by ion-beam sputter deposition

Title
Characteristics of ZnO thin film by ion-beam sputter deposition
Authors
박용욱최성창윤석진김현재고석근정형진C. Y. Park
Keywords
ZnO thin film; ion-beam sputter; oxygen/argon gas ratio; electrical resitivity; x-ray photoelection spectroscopy; rutherford backscattering spectroscopy
Issue Date
1998-02
Publisher
Journal of the Korean Physical Society
Citation
VOL 32, S1700-S1703
URI
http://pubs.kist.re.kr/handle/201004/12556
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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