Structural characterization of TiO₂ thin films on GaAs(100) substrates by MOCVD

Title
Structural characterization of TiO₂ thin films on GaAs(100) substrates by MOCVD
Authors
한영기이태경염상섭손맹호김은규민석기이정용
Keywords
MOCVD; Thin films; TiO₂; GaAs
Issue Date
1998-02
Publisher
Journal of the Korean Physical Society
Citation
VOL 32, S1538-S1540
URI
http://pubs.kist.re.kr/handle/201004/12561
ISSN
0374-4884
Appears in Collections:
KIST Publication > Article
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