Effects of nitrogen ion implantation on the thermal stability of tungsten thin films
- Effects of nitrogen ion implantation on the thermal stability of tungsten thin films
- 김용태; 권철순; 김동준; 박종완; 이창우
- Diffusion barrier; ion implantation; thermal stability; amorphous
- Issue Date
- Journal of vacuum science & technology. A, Vacuum, surfaces, and films : an official journal of the American Vacuum Society
- VOL 16, NO 2, 477-481
- Appears in Collections:
- KIST Publication > Article
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