Maskless selective epitaxial growth on patterned GaAs substrate by metalorganic chemical vapor deposition

Title
Maskless selective epitaxial growth on patterned GaAs substrate by metalorganic chemical vapor deposition
Authors
손창식박영균김성일김용김은규민석기최인훈
Keywords
Maskeless Selective Epitaxial Growth
Issue Date
1998-04
Publisher
Japanese Journal of Applied Physics, Part 1- Regular Papers
Citation
VOL 37, NO 4A, 1701-1703
URI
http://pubs.kist.re.kr/handle/201004/12587
ISSN
0021-4922
Appears in Collections:
KIST Publication > Article
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