Patterning 된 전극을 이용한 4 인치 Glass-to-Silicon wafer 의 정전 열 접합 .

Title
Patterning 된 전극을 이용한 4 인치 Glass-to-Silicon wafer 의 정전 열 접합 .
Authors
이덕중주병권이윤희정지원장진오명환
Keywords
MEMS
Issue Date
1998-04
Publisher
물리학회회보; Bulletin of the Korean Physical Society
Citation
v. 16, no. 1, 202-202
URI
http://pubs.kist.re.kr/handle/201004/12588
Appears in Collections:
KIST Publication > Conference Paper
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