Vacuum packaging of field emitter array using electrostatically-bonded glass-Si-glass/glass-glass structure

Title
Vacuum packaging of field emitter array using electrostatically-bonded glass-Si-glass/glass-glass structure
Authors
주병권이덕중정지원김훈이상조이남양장진오명환
Keywords
MEMS
Issue Date
1998-04
Publisher
대한전기학회 MEMS 연구회 학술발표회 논문집
Citation
, 101-106
URI
http://pubs.kist.re.kr/handle/201004/12601
Appears in Collections:
KIST Publication > Conference Paper
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